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Article
Heteropolytype structures with SiC quantum dots
Epitaxial silicon carbide layers of 3C-SiC polytype with an array of nanodimensional SiC quantum dots (QDs) have been obtained for the first time using an improved method of sublimation epitaxy in vacuum. The ...
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Article
GaN films grown by vapor-phase epitaxy in a hydride-chloride system on Si(111) substrates with AlN buffer sublayers
Oriented GaN layers with a thickness of about 10 μm have been grown by hydride-chloride vaporphase epitaxy (HVPE) on Si(111) substrates with AlN buffer layers. The best samples are characterized by a halfwidth...
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Article
Synthesis and structural characterization of a heterocomposition based on porous layers of SiC polytypes
We have studied the structure of transverse cross sections of a heterocomposition consisting of porous layers of silicon carbide polytypes (substrate 6H-SiC/por-6H-SiC/epi-3C-SiC/por-3C-SiC). The epitaxial lay...
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Article
Features of the structure of a porous silicon carbide layer obtained by electrochemical etching of a 6H-SiC substrate
Transverse sections of the (11–20) cuts of a 6H-SiC substrate-porous SiC layer-epitaxial 6H-SiC layer structure were studied using electron microscopy. An intermediate layer is revealed between pores and unetc...
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Article
Investigation of the structure of (p)3C-SiC-(n)6H-SiC heterojunctions
The structure of (p)3C-SiC-(n)6H-SiC epitaxial structures obtained by sublimation epitaxy in vacuum on 6H-SiC substrates was studied by methods of X-ray topography, X-ray diffraction, and transmission electron mi...
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Article
Specific properties of the PZT-based thin-film capacitor structures with excess lead oxide
The effect of excess lead oxide on the microstructure and ferroelectric properties of lead zirconate titanate (PZT) films was studied in PZT-based thin-film capacitor structures. It is shown that excess lead i...