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  1. No Access

    Article

    A Frequency Selective Silicon Vibration Sensor with Direct Electrostatic Stiffness Modulation

    In the field of industrial machinery an increasing demand for low cost vibration measurement equipment exists. The described frequency selective structures represent a low-cost alternative to the commonly used...

    Dirk Scheibner, Jürgen Wibbeler, Jan Mehner… in Analog Integrated Circuits and Signal Proc… (2003)

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    Chapter and Conference Paper

    A New Vacuum Friction Gauge Based on a Si Tuning Fork

    This contribution deals with design, fabrication and test of a micromachined gauge for vacuum pressure as well as with the related electronics. An electrostatically driven and capacitively sensed Si tuning for...

    Steffen Kurth, Karla Hiller, Norbert Zichner, Jan Mehner… in Transducers ’01 Eurosensors XV (2001)

  3. No Access

    Chapter and Conference Paper

    Computational Methods for Reduced Order Modeling of Coupled Domain Simulations

    This paper deals with computer aided generation of reduced-order models for fast static and dynamic simulations of micro electromechanical systems. Following previous work, we present improved methods to reduc...

    Fouad Bennini, Jan Mehner, Wolfram Dötzel in Transducers ’01 Eurosensors XV (2001)