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    Chapter and Conference Paper

    A New Vacuum Friction Gauge Based on a Si Tuning Fork

    This contribution deals with design, fabrication and test of a micromachined gauge for vacuum pressure as well as with the related electronics. An electrostatically driven and capacitively sensed Si tuning for...

    Steffen Kurth, Karla Hiller, Norbert Zichner, Jan Mehner… in Transducers ’01 Eurosensors XV (2001)