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  1. Article

    Open Access

    Correction to: Co-sputtering of Al1−xScxN thin films on Pt(111): a characterization by Raman and IR spectroscopies

    Dmytro Solonenko, Chuanqi Lan, Constance Schmidt… in Journal of Materials Science (2021)

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  2. Article

    Open Access

    Co-sputtering of \(\hbox {Al}_{1-x}\hbox {Sc}_{x}\hbox {N}\) thin films on Pt(111): a characterization by Raman and IR spectroscopies

    In this work, aluminium scandium nitride ( \(\hbox {Al}_{1-x}\hbox {Sc}_{x}\hbox {N}\)

    Dmytro Solonenko, Chuanqi Lan, Constance Schmidt… in Journal of Materials Science (2020)

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  3. No Access

    Article

    Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater

    In this paper, a novel concept of a thermo-mechanical MEMS actuator using aluminum thin-film heaters on a thermal oxide for electrical insulation is presented. The actuator is part of an universal tensile tes...

    Peter Meszmer, Karla Hiller, Steffen Hartmann, Alexey Shaporin… in Microsystem Technologies (2014)

  4. No Access

    Article

    Implementation of a low temperature wafer bonding process for acceleration sensors

    The paper describes a low temperature bond process based on an oxygen plasma pretreatment followed by 200°C and 400°C annealing which was to be integrated in our technological process flow to produce micromech...

    Maik Wiemer, Thomas Otto, Thomas Gessner, Karla Hiller… in MRS Online Proceedings Library (2011)

  5. No Access

    Article

    MEMS Metallization

    Silicon is the dominating material for the fabrication of MEMS devices, especially in high volume production. However, metals with their typical properties are used to enhance or enable the functionality of ME...

    Christian Lohmann, Knut Gottfried, Andreas Bertz… in MRS Online Proceedings Library (2003)

  6. No Access

    Chapter and Conference Paper

    A New Vacuum Friction Gauge Based on a Si Tuning Fork

    This contribution deals with design, fabrication and test of a micromachined gauge for vacuum pressure as well as with the related electronics. An electrostatically driven and capacitively sensed Si tuning for...

    Steffen Kurth, Karla Hiller, Norbert Zichner, Jan Mehner… in Transducers ’01 Eurosensors XV (2001)