Abstract
This contribution deals with design, fabrication and test of a micromachined gauge for vacuum pressure as well as with the related electronics. An electrostatically driven and capacitively sensed Si tuning fork is operated at the fundamental resonance frequency. The dam** is used as a measure of the pressure. We use bulk micromachining with two silicon and two glass wafers for the fabrication of the sensor. Design and working principle have been optimized in order to reach high sensitivity and a transfer curve with a logarithmic characteristic in a wide range (10−3 mbar …100 mbar).
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Kurth, S. et al. (2001). A New Vacuum Friction Gauge Based on a Si Tuning Fork. In: Obermeier, E. (eds) Transducers ’01 Eurosensors XV. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-59497-7_119
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DOI: https://doi.org/10.1007/978-3-642-59497-7_119
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-42150-4
Online ISBN: 978-3-642-59497-7
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