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Article
Open AccessThe substrate matters in the Raman spectroscopy analysis of cells
Raman spectroscopy is a powerful analytical method that allows deposited and/or immobilized cells to be evaluated without complex sample preparation or labeling. However, a main limitation of Raman spectroscop...
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Article
Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater
In this paper, a novel concept of a thermo-mechanical MEMS actuator using aluminum thin-film heaters on a thermal oxide for electrical insulation is presented. The actuator is part of an universal tensile tes...
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Article
A Frequency Selective Silicon Vibration Sensor with Direct Electrostatic Stiffness Modulation
In the field of industrial machinery an increasing demand for low cost vibration measurement equipment exists. The described frequency selective structures represent a low-cost alternative to the commonly used...
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Chapter and Conference Paper
A New Vacuum Friction Gauge Based on a Si Tuning Fork
This contribution deals with design, fabrication and test of a micromachined gauge for vacuum pressure as well as with the related electronics. An electrostatically driven and capacitively sensed Si tuning for...
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Chapter and Conference Paper
Improved Coupled-Field FE Analysis of Micromachined Electromechanical Transducers
FE analysis of electrostatic-structural interaction in MEMS is enhanced by three-dimensionally sensitive so-called transducer elements. As demonstrated at a surface micromachined tunable vibration sensor, they...
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Chapter and Conference Paper
Computational Methods for Reduced Order Modeling of Coupled Domain Simulations
This paper deals with computer aided generation of reduced-order models for fast static and dynamic simulations of micro electromechanical systems. Following previous work, we present improved methods to reduc...
