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Chapter and Conference Paper
A New Vacuum Friction Gauge Based on a Si Tuning Fork
This contribution deals with design, fabrication and test of a micromachined gauge for vacuum pressure as well as with the related electronics. An electrostatically driven and capacitively sensed Si tuning for...
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Chapter and Conference Paper
Computational Methods for Reduced Order Modeling of Coupled Domain Simulations
This paper deals with computer aided generation of reduced-order models for fast static and dynamic simulations of micro electromechanical systems. Following previous work, we present improved methods to reduc...