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Article
Extended Quantum Model for Porous Silicon Formation
The formation of porous silicon (PS) by electrochemical dissolution of bulk Si is described by a new model involving quantum mechanical calculations of the tunneling probability of holes through small crystall...
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Article
Formation and Properties of Porous Si Superlattices
Porous silicon superlattices (PS-SL) were investigated by transmission electron microscopy (TEM), scanning electron microscopy (SEM), spectroscopic ellipsometry and reflectance spectroscopy. Type I superlattic...
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Chapter
Porous Si: From single porous layers to porosity superlattices
Porous silicon has a manifold microscopic structure. Depending on the do** type and level of the substrate used for the anodization, pores with diameters up to 1 μm or down to a few nanometers can be formed [1]...
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Chapter
The influence of microelectronic processing steps on the properties of porous Si-layers
In the view of possible applications of porous Si layers in optoelectronic devices it is necessary to study the influence of microelectronic processing steps on the properties of porous Si films. Therefore, ch...