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Article
Oxidation of Gallium Nitride Epilayers in Dry Oxygen
The oxidation of GaN epilayers in dry oxygen has been studied. The 1-μm-thick GaN epilayers grown on (0001) sapphire substrates by Rapid-Thermal-Processing/Low Pressure Metalorganic Chemical Vapor Deposition w...
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Article
Initial stages of the cubic-InN growth with the technique of the pre-deposition of indium
The initial stages of the cubic indium nitride film growth at 350 °C were studied using low-pressure metal-organic chemical vapor deposition. The technique of the pre-deposition of indium was applied, that is,...
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Article
Synthesis and Properties of GaxMn1-xN films
Mn-doped GaN films were grown by hydride vapor phase epitaxy(HVPE). structural measurements show that Mn may substitute Ga atoms in the GaN lattice. Ferromagnetism is observed in these HVPE grown Mn-doped GaN ...
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Article
Dielectric properties of AlN film on Si substrate
AlN films were deposited on p-Si(1 1 1) substrates by a low-pressure metal–organic chemical vapor deposition (MOCVD) system and an Al–AlN–Si (MIS) capacitor was then prepared with the AlN layer as the insulato...
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Article
Impurity effects on photoluminescence in lateral epitaxially overgrown GaN
Using a two-photon laser-scanning microscope (LSM), the spectral and intensity variations of photoluminescence (PL) in a lateral epitaxially overgrown GaN film were mapped with submicron resolution. The PL res...
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Article
Prepare of ZnAl2O4/α -Al2O3 complex substrates and growth of GaN films
With the solid phase reaction between the ZnO film and α -Al2O3 substrate, the ZnAl2O4/ α -Al2O3 complex substrate have been prepared. GaN films were then directly grown on this new kind of substrate using light-...
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Article
Optical and Structural Properties of Mn-Implanted GaN Films
The optical and structural properties of Mn-implanted GaN films have been investigated. The films studied were grown by metal organic chemical vapor deposition (MOCVD), with Mn implanted in 150 KeV, which can ...
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Article
Structural Properties of Laterally Overgrown GaN
Structural properties of epitaxially laterally overgrown (ELO) GaN on patterned GaN ‘substrates’ by hydride vapor phase epitaxy (HVPE) have been investigated. The epitaxially lateral overgrowth of GaN on SiO2 are...
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Article
Oxidation of Gallium Nitride Epilayers in Dry Oxygen
The oxidation of GaN epilayers in dry oxygen has been studied. The 1-µm-thick GaN epilayers grown on (0001) sapphire substrates by Rapid-Thermal-Processing/Low Pressure Metalorganic Chemical Vapor Deposition w...
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Article
The Recrystallization Properties of Poly-GexSi1-xON SiO2/Si
In this paper, we have developed a new way to recrystallize the poly-GeSi on SiO2. 300nm poly-GeSi was grown by RTP/VLP-CVD on SiO2/Si, and then amorphized by 180 keV-Si+ ion implantation with dose of 2×1014 cm'2
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Article
Fabrication of Enhancement-Mode GaN-Based Metal–Insulator-Semiconductor Field Effect Transistor
An enhancement-mode GaN metal-insulator-semiconductor field-effect transistor was successfully fabricated on a GaN/AlGaN/GaN double heterojunction structure with SiO2 as insulator layer. The enhancement mode DC c...