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Article
Extended Quantum Model for Porous Silicon Formation
The formation of porous silicon (PS) by electrochemical dissolution of bulk Si is described by a new model involving quantum mechanical calculations of the tunneling probability of holes through small crystall...
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Article
Electrical Control of the Reflectance of Porous Silicon Layers
In this paper we demonstrate the filling of porous silicon (PS) layers with liquid crystals (LC's) in order to control the reflectance electrically. The preparation of PS and the choice of the right group of L...
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Article
Formation of Porous Silicon Filter Structures with Different Properties on Small Areas
Porous silicon (PS) layer systems have a broad range of possible applications. An advantage is the good control of the refractive index and the etch rate of the layers by the applied current density and the ti...
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Article
Perspectives of Porous Silicon Multilayer Technology
The exact control and adjustment of the etch parameters is important for the fabrication of well defined and reproducible devices based on porous silicon (PS) multilayers. In this paper the etch parameters “el...
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Article
«Holographie grating in Porous Silicon»
We have produced lateral porosity modulation in porous silicon layers on a micron scale. Using the photosensitivity of the etching process and optical interferences, stripes are formed periodically on the top ...
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Article
Optical Sensors based on Porous Silicon Multilayers: a Prototype
Porous silicon multilayers are easily produced by a variation of the current density during the electrochemical etching process. The obtained porosity profile in depth is equivalent to a refractive index profi...
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Article
Improved Interference Filter Structures Made of Porous Silicon
Recently passive optical devices like filter structures or waveguides based on porous silicon have attracted high interest due to their easy and cheap fabrication. We have formed interference filters using por...
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Article
Depth Gradients in Porous Silicon: How to Measure Them and How to Avoid Them
For the formation of single layers and layer systems the depth homogeneity of porous silicon (PS) plays a key role. We have measured qualitatively and quantitatively structural gradients in p-PS layers with in...
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Article
Optical Interference Filters Made of Porous Silicon
Porous silicon (PS) layers can easily be formed by an electrochemical etch process using a mixture of hydrofluoric acid (HF) and ethanol. The microstructure and porosity of the layers depend on the HF concentr...
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Chapter
The influence of microelectronic processing steps on the properties of porous Si-layers
In the view of possible applications of porous Si layers in optoelectronic devices it is necessary to study the influence of microelectronic processing steps on the properties of porous Si films. Therefore, ch...