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    Chapter and Conference Paper

    Interconnect Systems in Automotive Sensors at Elevated Temperatures

    One limiting parameter for the application of MEMS in cars at places with elevated temperatures is the interconnect and wiring system of these devices. Currently used materials and technological concepts often...

    Knut Gottfried, Thomas Gessner in Advanced Microsystems for Automotive Appli… (2003)

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    Chapter and Conference Paper

    A New Vacuum Friction Gauge Based on a Si Tuning Fork

    This contribution deals with design, fabrication and test of a micromachined gauge for vacuum pressure as well as with the related electronics. An electrostatically driven and capacitively sensed Si tuning for...

    Steffen Kurth, Karla Hiller, Norbert Zichner, Jan Mehner in Transducers ’01 Eurosensors XV (2001)