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Chapter and Conference Paper
Interconnect Systems in Automotive Sensors at Elevated Temperatures
One limiting parameter for the application of MEMS in cars at places with elevated temperatures is the interconnect and wiring system of these devices. Currently used materials and technological concepts often...
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Chapter and Conference Paper
A New Vacuum Friction Gauge Based on a Si Tuning Fork
This contribution deals with design, fabrication and test of a micromachined gauge for vacuum pressure as well as with the related electronics. An electrostatically driven and capacitively sensed Si tuning for...