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Article
Research of dry tribochemical mechanical polishing SiC with an innovation abrasive-catalytic abrasive cluster
A novel innovative catalytic abrasive cluster prepared in the laboratory was used for tribochemical mechanical polishing of silicon carbide wafers, and the polishing performance of catalytic abrasive cluster w...
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Article
Catalytic mechanism of tribochemical mechanical polishing on (0001) C-face of single crystal 6H-SiC substrate
Aiming at these problems of low efficiency, high cost, and environmental pollution in the chemical mechanical polishing (CMP) process of single crystal SiC substrates, a dry-type tribochemical mechanical polis...
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Article
A Novel Technique for Dressing Fixed Abrasive Lap** Pad with Abrasive Water Jet
The dressing method and dressing quality of the fixed abrasive lap** pad significantly impact the processing efficiency and surface quality of the workpiece material. Aiming at the problems of poor dressing ...
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Article
Effect of ethylenediamine on the surface glazed phenomenon of fixed abrasive pad under deionized water condition
Aiming at clarifying the effective mechanism of ethylenediamine additive on the glazed phenomenon of fixed abrasive pad (FAP) under deionized water polishing slurry condition, tribological experiments were car...
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Article
The Effect of Hydrogen Peroxide on Composite Lap** of Titanium Alloy (TC4) by Free Abrasive Assisted Fixed Abrasive
The optimal particle size and concentration of free abrasive for composite abrasive lap** were obtained by single factor test method. The effect of different concentrations of hydrogen peroxide on composite ...
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Article
Effect of particle size on friction signal characters when lap** quartz glass with fixed abrasive pad
The particle size of fixed abrasive pad (FAP) is an important factor affecting its machining performance and surface condition. The surface condition of consolidated FAP is closely related to the tribological ...
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Article
Composition Optimization of Slurry for Polishing TA31 Titanium Alloy with Free Abrasive
The composition of polishing slurry plays an important role in the material removal rate (MRR) and surface roughness of titanium alloy. In this study, chemical mechanical polishing (CMP) was used to polish TA3...
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Article
Corrosion Behaviors of Nitride Coatings on Titanium Alloy in NaCl-Induced Hot Corrosion
TiN and TiAlN coatings were deposited by arc ion plating on titanium alloys to study their hot corrosion resistance when they were exposed to NaCl at 600 °C. The microstructure and corrosion behaviors of nitri...
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Article
Study on Chemical Action Mechanism of Ferric Chloride-Based Polishing Slurry in CMP of 304 Stainless Steel
The type 304 stainless steel will be widely applied as one of the substrate materials of the flexible displays. In this paper, many experiments using chemical mechanical polishing (CMP) slurry with the FeCl3 oxid...
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Chapter and Conference Paper
Scheduling Optimization of Vehicles Considering Customer Rank and Delivery Time Demand
Customer satisfaction is an important factor to evaluate the service quality of the distribution of the vehicles, which is mainly reflected in the vehicles delivering goods to customers on time, which usually ...
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Chapter and Conference Paper
Study of Adaptive Cone Taper Measuring Device
A kind of simple practical adaptive quantitative detection taper cone measuring devices is developed in this paper, which can resolve the qualitative measurement which cannot obtain concrete error problem, and...