Abstract
The dressing method and dressing quality of the fixed abrasive lap** pad significantly impact the processing efficiency and surface quality of the workpiece material. Aiming at the problems of poor dressing effect and high damage degree of the lap** pad in the existing fixed abrasive dressing technology, a new technology using abrasive water jet for dressing is proposed. The self-developed abrasive water jet system was used to conduct a dressing test on a fixed abrasive lap** pad with a copper content of 30%. The influence of jet pressure, nozzle target distance, abrasive concentration and injection angle on the dressing effect were discussed, and the influence mechanism was analyzed by discrete element simulation. The results show that the dressing effect of the abrasive water jet is good. The dressing quality first increases and then decreases with the increase of jet pressure, nozzle target distance and injection angle, and increases with the increase of abrasive concentration. The influence mechanism of each parameter is closely related to the residual height of the lap** pad surface after dressing. The higher the residual height, the rougher the lap** pad surface, and the better the dressing effect of the lap** pad.
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References
Li, L. M., Li, M., & Zhu, Y. W. (2009). Fixed abrasive lap** and polishing present situation and prospect. Diamond & Abrasives Engineering 5(4):17–22. https://doi.org/10.13394/j.cnki.jgszz.2009.05.005
Ling, S. Z., Mo, H. L., Wang, Z. X., & Zhu, Y. W. (2017). Effect of abrasive on processing characteristics of fixed diamond aggregations pad lap** quartz glass. Diamond & Abrasives Engineering. 37(5):13–14. https://doi.org/10.13394/j.cnki.jgszz.2017.5.0002
Liang, H., Martin, J. M., & Mogne, T. L. (2002). Interfacial transfer between copper and polyurethane in CMP. Journal of Electronic Materials., 31(8), 872–878. https://doi.org/10.1007/s11664-002-0198-0
Qiu, S. X. (2007). Study on conditioner for polishing pad in CMP. Dalian University of Technology. https://doi.org/10.7666/d.y1225585
Zhao, W. H., Zhou, Z. H., & Lv, B. H. (2007). Study on polishing pad dressing in chemical mechanical polishing process. New Technology & New Process., 3, 24–27. https://doi.org/10.3969/j.issn.1003-5311.2007.03.006
Seike, Y., Amari, M., Miyachi, K., & Doi, T. (2007). CMP pad cleaning and conditioning technology for the semiconductor manufacturing with super high-pressure micro jet (HPMJ). Journal of the Japan Society for Abrasive Technology. 51:134–1 37. https://xueshu.baidu.com/usercenter/paper/show?paperid=3e1e4a2ffda17082a67e9 e099727cfda&site=xueshu_se&hitarticle=1
Seike, Y., Denardis, D., Sugiyama, M., Miyachi, K., Doi, T., & Philipossing, A. (2005). Development and analysis of a high-pressure micro Jet pad conditioning system for interlayer dielectric chemical mechanical planarization. Japanese Journal of Applied Physics., 44(3), 1225–1231. https://doi.org/10.1143/JJAP.44.1225
Denardis, D., Seike, Y., Takaoka, M., Miyachi, K., & Philipossian, A. (2006). Investigation of high-pressure micro jet technology as an alternative to diamond disc conditioning in ILD CMP. Wear, 260(11), 1224–1231. https://doi.org/10.1016/j.wear.2005.08.002
Kurokawa, S., Miyachi, K., Seike, Y., Doi, T., Nakayama, K., Seike, Y., Matsukawa, Y., & Umezaki, Y. (2008). CMP characteristics of silicon wafer with a micro-fiber pad, and pad conditioning with high pressure micro jet (HPMJ). The 5th International Symposium on Advanced Science and Technology of Silicon Materials Kona, Hawaii, USA. 62(5–8):645–654. https://xueshu.baidu.com/usercenter/paper/show?paperid=1c4c0e32e537cd50351a97469c63c984&site=xueshu_se&hitarticle=1
Miyachi, K., Kurokawa, S., Doi, T., & Ohnishi, O. (2010). Unwoven fabric pads non-destructive conditioning by high pressure micro jet in CMP process. Journal of the Japan Society for Precision Engineering., 76(9), 1076–1081. https://doi.org/10.2493/jjspe.76.1076
Miyachi, K., Seike, Y., Haba, S., Kurokawa, S., Doi, T. (2011). Impact of a High Pressure Micro Jet (HPMJ) on the conditioning and cleaning of unwoven fabric polyester pads in silicon polishing. International Conference on Planarization/CMP Technology. VDE VERLAG GmbH. 1–6. https://xueshu.baidu.com/usercenter/paper/show?paperid=303e5ab218828baa0931686ccce0f194&site=xueshu_se
Kim, H., Park, B., & Sangick, L. (2004). Self-conditioning fixed abrasive pad in CMP. Journal of the electrochemical society., 151(12), 858–862. https://doi.org/10.1149/1.1813951
Jae young Choi and Hae do Jeong. (2004). A study on polishing of molds using hydrophilic fixed abrasive pad. International journal of machine tools & manufacture., 44, 1163–1169. https://doi.org/10.1016/j.ijmachtools.2004.04.006
Hoyoun, K., Hyoungjae, K., & Haedo, J. (2003). Self-conditioning of encapsulated abrasive pad in chemical mechanical polishing. Journal of materials processing technology., 142, 614–618. https://doi.org/10.1016/s0924-0136(03)00641-1
Tang, X. X., Zhu, Y. W., Wang, C., Gu, Y. B., & Ju, Z. L. (2004). Realization of self-conditioning process of hydrophilic fixed abrasive pad. Nanotechnology and Precision Engineering. 12(01): 614–618. https://doi.org/10.13494/j.npe.20140037
Chen, J. P., Zhu, Y. W., Peng, Y. N., Guo, J., & Ding, C. (2020). Silica-assisted fixed agglomerated diamond abrasive polishing. Journal of Manufacturing Processes., 59, 595–603. https://doi.org/10.1016/j.jmapro.2020.09.013
Wang, J. B. (2015). Material removal mechanism and process research of lap** sapphire by fixed abrasive. Nan**g University of Aeronautics and Astronautics. https://xueshu.baidu.com/usercenter/paper/show?paperid=1bd51c9ff724c3e3354afad4a26d5b9d&site=xueshu_se&hitarticle=1
Holland, K., Hurst, A., & Pinder, H. (2002) Improving cost of ownership and performance of CMP process and consumables. Micro -Santa Monica-. 20(4):26–32. https://xueshu.baidu.com/usercenter/paper/show?paperid=b0e245ba5fe40815fe3e28fa8b6f5577&site=xueshu_se&hitarticle=1
Tsai, M. Y., & Yang, W. Z. (2012). Water-jet-assisted diamond disk dressing characteristics of CMP polishing pad. The International Journal of Advanced Manufacturing Technology., 62, 645–654. https://doi.org/10.1007/s00170-011-3838-9
Tang, X. X., Zhu, Y. W., Fu, J., Wang, C., & Ju, Z. L. (2012). Influence of copper content on the machining performance of hydrophilic fixed abrasive pad. Diamond & Abrasives Engineering. 32(4):10–13. https://doi.org/10.13394/j.cnki.jgszz.2012.04.009
Zhang, Z. Z., Yao, P., Zhang, Z. Y., Xue, D., Wang, C., & Zhu, H. (2017). A novel technique for dressing metal-bonded diamond grinding wheel with abrasive waterjet and touch truing. International Journal of Advanced Manufacturing., 93, 3063–3073. https://doi.org/10.1007/s00170-017-0738-7
Miu, X. J. (2020). Study on cutting mechanisms and quality improvement methods of abrasive water jet. Jiangnan University. https://doi.org/10.27169/d.cnki.gwqgu.2020.000061
Ren, J. L., Zhou, L. H., Han, L., Zhou, J. N., & Yan, M. (2017). Discrete Simulation of Vertical Screw Conveyor Based on Particle Scaling Theory. The Chinese Journal of Process Engineering. 17(05):936–943. https://doi.org/10.12034/j.issn.1009-606X.217109
Feng, Y. T, & Owen, D. (2014). Discrete element modelling of large scale particle systems: i. exact scaling laws. Computational Particle Mechanics. 1(2):159–168. https://doi.org/10.1007/s40571-014-0010-y
Li. Y. X., Li, F. X., Xu, X. M., Sheng, C. P., & Meng, K. P. (2019). Discrete element parameter calibration of wheat flour based on particle scaling. Transactions of the Chinese Society of Agricultural Engineering. 35(16):320–327. https://doi.org/10.11975/j.issn.1002-6819.2019.16.035
Sakai, M., Takahashi, H., Pain, C., Latham, J., & **ang, J. (2012). Study on a large-scale discrete element model for fine particles in a fluidized bed. Advanced Powder Technology., 23(5), 673–681. https://doi.org/10.1016/j.apt.2011.08.006
Weinhart, T., Labra, C., Luding, S., & Ooi, J. Y. (2016). Influence of coarse-graining parameters on the analysis of DEM simulations of silo flow. Powder Technology., 293, 138–148. https://doi.org/10.1016/j.powtec.2015.11.052
Thomas, R., & André, K. (2018). Scaling of the angle of repose test and its influence on the calibration of DEM parameters using upscaled particles. Powder Technology., 330, 58–66. https://doi.org/10.1016/j.powtec.2018.01.044
Munjiza, A., Feng, Y. T., & Loughran, J. (2009). On upscaling of discrete element models: Similarity principles. Engineering Computations., 26(6), 599–609. https://doi.org/10.1108/02644400910975405
William, S., Daniel, M., Carmine, S., Karl, S., & Peng, H. (2014). Comparison of discrete element method and traditional modeling methods for steady-state wheel-terrain interaction of small vehicles. Journal of Terramechanics., 56, 61–75. https://doi.org/10.1016/j.jterra.2014.08.004
Meng, X. W. (2014). The simulation and experimental research of AJW cutting hard and brittle materials. Harbin University of Science and Technology. https://doi.org/10.27063/d.cnki.ghlgu.2014.000002
Momber, A. W. & Kovacevic, R. (1998). Principles of abrasive water jet machining. London: Springer. 20–22. https://doi.org/10.1007/978-1-4471-1572-4
Hashish, M. (1989). Pressure effects in abrasive-waterjet (AWJ) machining. Journal of Engineering Materials and Technology., 111(3), 221–228. https://doi.org/10.1115/1.3226458
Liu, D., Zhu, H. T., Huang, C. Z., Wang, J., & Yao, P. (2016). Prediction model of depth of penetration for alumina ceramics turned by abrasive waterjet-finite element method and experimental study. The International Journal of Advanced Manufacturing., 87(9–12), 2673–2682. https://doi.org/10.1007/s00170-016-8600-x
Zhang, W. C., & Wu, M. P. (2017). Optimization of process parameters of abrasive water jet polishing 45 steel. Machine Design and Research. 33(6): 113–117. https://doi.org/10.13952/j.cnki.jofmdr.2017.0254
Che, C. L. (2011). Study on the abrasive water jet polishing technology for curve surface of hard-brittle materials. Shangdong University. https://doi.org/10.7666/d.y2045564
Wang, Z. K. (2016). Lap** and polishing mechanism of magnesium aluminate spinel doom cover by fixed abrasive. Nan**g University of Aeronautics and Astronautics
Liu, Z. L. (2009). Tribological principle. Higher Education Press. 51–54. https://xueshu.baidu.com/usercenter/paper/show?paperid=a17e813e4850f1bfa91eed85aac1f734&site=xueshu_se
Wang, Z. K., Zhu, Y. W., Li, X. L., Zhu, N. N. & Li, J. (2017) Average cutting depth and subsurface damage of spinel induced by lap** with fixed abrasive pad. Journal of The Chinese Ceramic Society. 45(03): 402–409. https://doi.org/10.14062/j.issn.0454-5648.2017.03.12
Acknowledgements
This study was supported by the national natural science foundation of China (U1804142), Project funded by China Postdoctoral Science Foundation (2020M672220), Science and technology plan projects of Henan province (212102210062), Postdoctoral Research Project of Henan Province (201903045).
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Wang, Z., Yang, Y., Zhang, Z. et al. A Novel Technique for Dressing Fixed Abrasive Lap** Pad with Abrasive Water Jet. Int. J. of Precis. Eng. and Manuf.-Green Tech. 10, 1351–1373 (2023). https://doi.org/10.1007/s40684-022-00500-5
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DOI: https://doi.org/10.1007/s40684-022-00500-5