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  1. No Access

    Chapter and Conference Paper

    Micromechanical Acceleration Sensor

    A miniature silicon acceleration sensor has been developed, consisting of a capacitive accelerometer and a electronic system. A seismic mass suspended by thin bars is used as sensing element. Signal conversion...

    U. Breng, T. Geßner, P. Lorenz, M. Rauch, W. Leyffer… in Micro System Technologies 90 (1990)

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    Chapter and Conference Paper

    Deposition, Patterning, Properties and Applications of Al2O3 Films

    Alumina is an interesting material for different applications in microelectronics and sensor design. Remarkable properties are the excellent efficiency as a barrier against diffusion of alkali ions and water m...

    H. Burghardt, H. Cebulla, W. Leimbrock, W. Leyffer… in Micro System Technologies 90 (1990)