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    Chapter and Conference Paper

    Micromechanical Acceleration Sensor

    A miniature silicon acceleration sensor has been developed, consisting of a capacitive accelerometer and a electronic system. A seismic mass suspended by thin bars is used as sensing element. Signal conversion...

    U. Breng, T. Geßner, P. Lorenz, M. Rauch, W. Leyffer… in Micro System Technologies 90 (1990)