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  1. No Access

    Article

    In Situ SEM Observations of Electromigration Voids in Al Lines under Passivation

    Paul A. Flinn, Michael C. Madden, Thomas N. Marieb in MRS Bulletin (1994)

  2. No Access

    Article

    Synchrotron Radiation for Measurement of Contaminants on Silicon Surfaces

    The detection limit for aluminum using total reflection x-ray fluorescence (TXRF) is approximately 100 times lower for a synchrotron source compared to a conventional source. The detection limit for transition...

    Michael C. Madden, David C. Wherry, Piero Pianetta… in MRS Online Proceedings Library (1993)

  3. No Access

    Article

    High Resolution Observation of Void Motion in Passivated Metal Lines Under Electromigration Stress

    Using a 120 kV STEM equipped with a backscattered electron detector and operated as a conventional SEM. voids in metal lines can be detected through 1 μm of passivation. By applying current to passivated thin met...

    Michael C. Madden, Edward V. Abratowski, Thomas Marieb… in MRS Online Proceedings Library (1992)