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Article
Open AccessHigh resolution skin-like sensor capable of sensing and visualizing various sensations and three dimensional shape
Human skin contains multiple receptors and is able to sense various stimuli such as temperature, pressure, force, corrosion etc and to feel pains and the shape of objects. The development of skin-like sensors cap...
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Article
Discrete microfluidics based on aluminum nitride surface acoustic wave devices
To date, most surface acoustic wave (SAW) devices have been made from bulk piezoelectric materials, such as quartz, lithium niobate or lithium tantalite. These bulk materials are brittle, less easily integrate...
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Article
Open AccessFilm bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer
The film bulk acoustic resonator (FBAR) is a widely-used MEMS device which can be used as a filter, or as a gravimetric sensor for biochemical or physical sensing. Current device architectures require the use ...
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Article
Open AccessUV sensing using film bulk acoustic resonators based on Au/n-ZnO/piezoelectric-ZnO/Al structure
A new type of ultraviolet (UV) light sensor based on film bulk acoustic wave resonator (FBAR) is proposed. The new sensor uses gold and a thin n-type ZnO layer deposited on the top of piezoelectric layer of FB...
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Article
Flexible surface acoustic wave devices and its applications in microfluidics
Flexible electronics and microsystems are an emerging technology with a tremedous impact to the future electronics and information technology and widespread applications. Various devices and microsystems have ...
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Article
Flexible Surface Acoustic Wave Based Temperature and Humidity Sensors
Flexible surface acoustic wave (SAW) based temperature and humidity sensors were fabricated and characterized. ZnO piezoelectric films were deposited on polyimide substrates by DC magnetron sputtering. ZnO fil...
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Article
Open AccessFast Response and High Sensitivity ZnO/glass Surface Acoustic Wave Humidity Sensors Using Graphene Oxide Sensing Layer
We report ZnO/glass surface acoustic wave (SAW) humidity sensors with high sensitivity and fast response using graphene oxide sensing layer. The frequency shift of the sensors is exponentially correlated to th...
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Article
Enhancement of microfluidic efficiency with nanocrystalline diamond interlayer in the ZnO-based surface acoustic wave device
Ultra-smooth nanocrystalline diamond (UNCD) films with high-acoustic wave velocity were introduced into ZnO-based surface acoustic wave (SAW) devices to enhance their microfluidic efficiency by reducing the ac...
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Article
Open AccessFlexible surface acoustic wave resonators built on disposable plastic film for electronics and lab-on-a-chip applications
Flexible electronics are a very promising technology for various applications. Several types of flexible devices have been developed, but there has been limited research on flexible electromechanical systems (...
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Article
ZnO thin film surface acoustic wave based lab-on-a-chip
Lab-on-a-chip (LOC) is one of the most important microsystem applications with promise for use in microanalysis, drug development, diagnosis of illness and diseases etc. LOC typically consists of two main comp...
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Chapter
Crosslinked PMMA as a Low-Dimensional Dielectric Sacrificial Layer for MEMS/NEMS and Quantum Nanostructures Fabrication
Microelectromechanical systems (MEMS) is a term that describes the integration of miniaturized mechanical elements with microelectronics through microfabrication technology, so that a mechanical function is co...
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Article
Capacitance behavior of GaAs-MIS structures with low-temperature grown GaAs dielectric
Low temperature (LT-) grown GaAs has been used as a dielectric in a metal/ dielectric/semiconductor structure, and its capacitance behavior has been investigated by C–VB} and admittance spectroscopy. The C-VB} me...
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Article
LT-GaAs with high breakdown strength at low temperature for power MISFET applications
Low temperature grown GaAs has been fabricated containing a limited amount of excess arsenic. The material has a low conductivity in the order of 100KΩ cm, due to hop** in a deep donor band. This σ-LT-GaAs w...
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Article
The influence of indium tin oxide deposition on the transport properties at InP junctions
The influence of the deposition of indium tin oxide (ITO) on the electrical properties at n- and p-InP junctions have been investigated by current-voltage-temperature and capacitance-voltage measurements. It w...
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Article
The influence of indium tin oxide deposition on the transport properties at InP junctions
The influence of the deposition of indium tin oxide (ITO) on the electrical properties at n- and p-InP junctions have been investigated by current-voltage-temperature and capacitance-voltage measurements. It w...
