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Article
Physical-Chemical Evolution of Hf-aluminates upon Thermal Treatments
This study presents an investigation on physical-chemical stability of (HfO2)x(Al2O3 )1-x alloys upon prolonged post-deposition annealings. Two different Hf-aluminates were deposited by ALCVDTM, containing 34% an...
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Article
Characterization of nitrided silicon-silicon dioxide interfaces
A newly-developed technique for the simultaneos characterization of the oxide-silicon interface properties and of bulk impurities was used for a systematic study of the nitridation process of thin oxides. This...