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Article
X-ray lithography and small-angle X-ray scattering: a combination of techniques merging biology and materials science
The advent of micro/nanotechnology has blurred the border between biology and materials science. Miniaturization of chemical and biological assays, performed by use of micro/nanofluidics, requires both careful...
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Article
Time-resolved structure investigation with small angle X-ray scattering using scanning techniques
Due to the availability of high-brilliance X-rays at synchrotron radiation facilities, small angle X-ray scattering (SAXS) measurements have become feasible for new sample environments, like microfluidics or a...
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Article
Low cost transparent SU-8 membrane mask for deep X-ray lithography
Deep X-ray lithography masks require good transparency and mechanical resistance to the intense synchrotron X-ray beam, large active areas (cm)2 and compatibility with the standard fabrication processes (optical ...