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    Article

    X-ray lithography and small-angle X-ray scattering: a combination of techniques merging biology and materials science

    The advent of micro/nanotechnology has blurred the border between biology and materials science. Miniaturization of chemical and biological assays, performed by use of micro/nanofluidics, requires both careful...

    B. Marmiroli, H. Amenitsch in European Biophysics Journal (2012)

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    Time-resolved structure investigation with small angle X-ray scattering using scanning techniques

    Due to the availability of high-brilliance X-rays at synchrotron radiation facilities, small angle X-ray scattering (SAXS) measurements have become feasible for new sample environments, like microfluidics or a...

    H. Amenitsch, B. Marmiroli in Rendiconti Lincei (2011)

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    Article

    Low cost transparent SU-8 membrane mask for deep X-ray lithography

    Deep X-ray lithography masks require good transparency and mechanical resistance to the intense synchrotron X-ray beam, large active areas (cm)2 and compatibility with the standard fabrication processes (optical ...

    S. Cabrini, F. Pérennès, B. Marmiroli, A. Olivo, A. Carpentiero in Microsystem Technologies (2005)