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Atomic Layer Etching Applications in Nano-Semiconductor Device Fabrication
These days, the process of plasma etching is exhibited in various forms, including the reactive ion etching (RIE) method. Not only memory device but...
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Nanoscale Etching of La0.7Sr0.3MnO3 Without Etch Lag Using Chlorine Based Inductively Coupled Plasma
La 0.7 Sr 0.3 MnO 3 (LSMO) has been considered as a promising material for future electronic and spintronic device application due to its unique...
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Improved electrical properties of micro light-emitting diode displays by ion implantation technology
Generally, the inductively coupled plasma-reactive ion etching (ICP-RIE) mesa technology was used to remove p-GaN/MQWs and expose n-GaN for...
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Etching of scandium-doped aluminum nitride using inductively coupled plasma dry etch and tetramethyl ammonium hydroxide
Properties such as wide bandgap, higher electromechanical coupling, and low dielectric permittivity have propelled Sc x Al 1− x N as an advantageous...
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Fast smoothing on diamond surface by inductively coupled plasma reactive ion etching
The synergetic effects of surface smoothing exhibited during the inductively coupled plasma reactive ion etching (ICP-RIE) of free-standing...
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Controlled and Fast Fabrication for P-Type Porous Silicon Structures with a High Aspect Ratio by Electrochemical Etching
In this experiment, electrochemical etching of ordinary P -type monocrystal silicon was firstly studied in a mixed etching solution of hydrofluoric...
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Direct Patterning of Carbon Nanostructures
Various fabrication techniques have been developed to prepare carbon nanostructures with unique chemical, physical, optical, magnetic, electrical,...
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Ion-tunable antiambipolarity in mixed ion–electron conducting polymers enables biorealistic organic electrochemical neurons
Biointegrated neuromorphic hardware holds promise for new protocols to record/regulate signalling in biological systems. Making such artificial...
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Advances in 3D silicon-based lithium-ion microbatteries
Miniaturization of modern microelectronics to accommodate the development of portable and smart devices requires independent energy storage that is...
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Wet etch, dry etch, and MacEtch of β-Ga2O3: A review of characteristics and mechanism
β-Ga 2 O 3 , a promising ultra-wide bandgap material for future high-power electronics and deep-ultraviolet optoelectronics applications, has drawn...
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Field-Effect Transistors with High Electron Mobility on an AlGaN/GaN Heterostructure with Gate Recessing into the Barrier Layer
AbstractThe influence of the thickness of the barrier layer of a nitride heterostructure on the characteristics of field-effect transistors with high...
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Application of a Femtosecond Laser in the Fabrication of Quartz Sensing Elements for MEMS Accelerometers
AbstractA group method of manufacturing quartz sensing elements of microelectromechanical systems (MEMS) for Q-flex type accelerometers is known, it...
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Damage-Free Atomic-Scale Etching and Surface Enhancements by Electron-Enhanced Reactions: Results and Simulations
Ion-enhanced dry etch methods inflict “etch process damage” through surface ion bombardment. These inherent limitations in conventional dry etch...
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Study on different isolation technology on the performance of blue micro-LEDs array applications
In this study, a 3 × 3 blue micro-LED array with a pixel size of 10 × 10 μm 2 and a pitch of 15 μm was fabricated on an epilayer grown on a sapphire...
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Improved polarization retention in LiNbO3 single-crystal memory cells with enhanced etching angles
Multifunctional LiNbO 3 material plays an important role in domain wall microelectronics and nonlinear optoelectronics. However, the material is hard...
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Large Dense Periodic Arrays of Vertically Aligned Sharp Silicon Nanocones
Convex cylindrical silicon nanostructures, also referred to as silicon nanocones, find their value in many applications ranging from photovoltaics to...
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Ni/Al multilayer reactions on nanostructured silicon substrates
Fast energy release, which is a fundamental property of reactive multilayer systems, can be used in a wide field of applications. For most...
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Self-assembled pagoda-like nanostructure-induced vertically stacked split-ring resonators for polarization-sensitive dichroic responses
Stacked split-ring resonators (SSRR) arrays exhibiting polarization-sensitive dichroic responses in both visible and near-infrared wavelengths are...
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Pixelated carbon nanotube forests
Carbon nanotube forests (CNTFs) were grown on a patterned substrate to form square pixelated arrays. Two-level full factorial optimization first...
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Innovative temperature-based texturization process for reducing reflectivity in boron-doped as-cut multi-crystalline silicon wafers
This research paper presents a comprehensive investigation into the reflectivity reduction of multi-crystalline silicon wafers through the...
