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Article
Compositional Fluctuations in AlxGa1-xN Layers grown on 6H-SiC (0001) by Metal Organic Vapor Phase Epitaxy
The microstructural evolution of AlxGa1-xN films grown by metalorganic vapor phase epitaxy on 6H-SiC (0001) was studied by means of X-ray diffraction, atomic force microscopy and transmission electron microscopy ...
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Article
Transmission Electron Microscopy Study of Nonpolar a-Plane GaN Grown by Pendeo-Epitaxy on (1120) 4H-SiC.
Pendeo-epitaxy has been applied to nonpolar a-plane GaN layers in order to observe if such process will lead to defect reduction in comparison with direct growth on this plane. Uncoalesced and coalesced a-plan...
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Article
Characterization and Comparison of 4H-SiC \(\left( {11\bar 20} \right)\) and 4H-SiC(0001) 8° Off-Axis Substrates and Homoepitaxial Films
Homoepitaxial films of 4H-SiC \(\left( {11\bar 20} \right)\) and 8° off-axis 4H-SiC(0001) have been grown and characterized. The...
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Article
Growth and Characterization of Epitaxial GaN Thin Films on 4H-SiC (11.0) Substrates
GaN thin films were grown via metalorganic vapor phase epitaxy on a-plane 4H- SiC substrates on which had been deposited an AlN buffer layer. Atomic force microscopy images revealed that the microstructure of ...
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Article
Microstructure of Nonpolar a-Plane GaN Grown on (1120) 4H-SiC Investigated by TEM.
Plan-view and cross-section samples of (1120) (a-plane) GaN grown on 4H-SiC substrates with AlN buffer layers were studied by transmission electron microscopy. Samples reveal the presence of a high density of sta...