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    Chapter and Conference Paper

    Influence of Plasma Si-Nttride Deposition on the Dark I-V Curves of MIS Contacts for Inversion Layer Solar Cells

    The influence of the plasma Swiitride deposition process on electrical properties of Al/Si-oxide/p-Si MIS contacts was investigated. The Si-nitride was deposited onto the MIS diodes in a rf glow discharge by t...

    R. Schörner, R. Hezel in Fourth E.C. Photovoltaic Solar Energy Conference (1982)

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    Chapter and Conference Paper

    Application of Amorphous Silicon Nitride for MIS/Inversion Layer Solar Cells

    It is demonstrated that CVD Si-nitride exhibits outstanding properties as transparent dielectric for MIS/inversion layer solar cells: very high interface charge densities QN/q up to 7×1012cm−2 with absolute stabi...

    R. Hezel, R. Schörner, T. Meisel in Photovoltaic Solar Energy Conference (1981)