Skip to main content

5 Result(s)

within Ing-Shin Chen Remove this filter

and

  1. No Access

    Article

    Preparation of Piezoelectric PZT Thin Films by Mocvd for MEMS Applications

    Integration of piezoelectric Pb(Zr,Ti)O3 (PZT) thin films promises to provide silicon-based microelectromechanical systems (MEMS) with added functionality. PZT films with compositions near the tetragonal/rhombohe...

    Ing-Shin Chen, Dong-Joo Kim, Jon-Paul Maria… in MRS Online Proceedings Library (1999)

  2. No Access

    Article

    Low Temperature MOCVD of Thin Film PZT

    Incorporation of ferroelectric thin films into integrated microelectronics requires deposition temperatures compatible with back-end processing. Pb(Zr, Ti)O3 (PZT) thin films have been deposited at low temperatur...

    Ing-Shin Chen, Jeffery F. Roeder in MRS Online Proceedings Library (1998)

  3. No Access

    Article

    Advances in the Characterization of Compositionally-Graded Layers in Amorphous Semiconductor Solar Cells by Real Time Spectroellipsometry

    We have developed a real time spectroellipsometry data analysis procedure that allows us to characterize compositionally-graded amorphous semiconductor alloy thin films prepared by plasma-enhanced chemical vap...

    R. W. Collins, Sangbo Kim, Joohyun Koh, J. S. Burnham… in MRS Online Proceedings Library (1996)

  4. No Access

    Article

    Structural Evolution of Top-Junction a-Si:C:H:B and Mixed-Phase (Microcrystalline Si)-(a-Sil-xCx:H) p-Layers in a-Si:H n-i-p Solar Cells

    We have applied real time spectroellipsometry (RTSE) to study hydrogenated amorphous silicon (a-Si:H) solar cells fabricated in the Cr/n-i-p configuration using plasma-enhanced chemical vapor deposition (PECVD...

    Joohyun Koh, J. S. Burnham, Yeeheng Lit, Hongyue Liu… in MRS Online Proceedings Library (1996)

  5. No Access

    Article

    Real Time Monitoring of Amorphous Silicon Solar Cell Fabrication

    We have applied real time spectroscopie ellipsometry (RTSE) to monitor the successive growth of p-type a-Si1-xCx:H and i-type a-Si:H on specular SnO2:F (i.e., the superstrate solar cell configuration) in a single...

    Yiwei Lu, Sangbo Kim, J. S. Burnham, Ing-Shin Chen… in MRS Online Proceedings Library (1995)