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    Simulation and calculation of the piezoelectric modulus of a lead zirconate-titanate thin film in a test microstructure

    Results of simulation of stresses in the test structure of a silicon beam and analytical calculation of piezoelectric modulus d 31 of a lead zirconate-titanate (PZT) thin film arranged in ...

    V. V. Amelichev, D. A. Saikin, V. M. Roshchin, M. V. Silibin in Semiconductors (2010)