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    Chapter and Conference Paper

    Fabrication of a Nanoneedle Array

    We have developed a new fabrication method for building large arrays of needles with nanometer-size apertures. Because the process is entirely based on standard photolithographic techniques and conventional si...

    Herc P. Neves, Randall H. Goldsmith, Avery W. Degolyer… in Transducers ’01 Eurosensors XV (2001)