Summary
We have developed a new fabrication method for building large arrays of needles with nanometer-size apertures. Because the process is entirely based on standard photolithographic techniques and conventional silicon-based processing, large arrays can be obtained with a fast turnaround. The arrays can be easily integrated with on-chip microfluidics. Potential applications include the injection of substances into cells and also subcellular organelles such as vacuoles, mitochondria, and chloroplasts.
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Neves, H.P., Goldsmith, R.H., Degolyer, A.W., Bachand, G.D., Schmidt, J.J., Montemagno, C.D. (2001). Fabrication of a Nanoneedle Array. In: Obermeier, E. (eds) Transducers ’01 Eurosensors XV. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-59497-7_250
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DOI: https://doi.org/10.1007/978-3-642-59497-7_250
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-42150-4
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