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Reference Work Entry In depth
Integrated Microsystem Technology
With the development of integrated circuit technology, the functionality and complexity of CMOS circuitry increase greatly. It is important to integrate different materials and device technologies to create in...
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Chapter and Conference Paper
A Study on Spatiotemporal Performances of the Urban Atmospheric Environment Carrying Capacity in 35 Large Chinese Cities from 2015 to 2019
In the past decades, the urbanization of Chinese cities is unsustainable, which needs to consume a lot of resources and cause heavy atmospheric pollution. Being aware of this problem, governments have implemen...
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Chapter and Conference Paper
Identification of Spatial Economic Development Model in Chengyu Urban Agglomeration County by Applying Exploratory Spatial Data Analysis
Using the average Night-Time Light Data in the Chengyu Urban Agglomeration County from 2012 to 2019, the spatial weight matrix is defined based on the rook and arc distance contiguity, and the global and local...
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Article
A novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design
This paper proposes a novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design. The principles of fuzzy reliability and Taguchi design are both ...
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Article
An electrical-coupling-suppressing MEMS gyroscope with feed-forward coupling compensation and scalable fuzzy control
This paper proposes a novel electrical coupling suppressing and drive closed loop control method for a MEMS gyroscope with feed-forward coupling compensation (FCC) and scalable fuzzy control. Theoretical analy...
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Article
A CMOS compatible process for monolithic integration of high-aspect-ratio bulk silicon microstructures
We report a CMOS compatible bulk micromachining method for the integration of high-aspect-ratio single crystal silicon MEMS (micro electromechanical systems) devices and signal conditioning circuit on a standa...
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Article
MEMS gyroscope control system using a band-pass continuous-time sigma-delta modulator
This paper presents a MEMS gyroscope control system of using a high-order band-pass continuous-time sigma-delta modulator. Compared with a low-pass discrete-time sigma-delta modulator based solution, the band-...
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Article
Closed loop control design for the sense mode of micromachined vibratory gyroscopes
This paper presents a novel design method of force rebalance control for the sense mode of micromachined vibratory gyroscopes. Specific theoretical deductions are performed to identify a precise linear model o...
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Article
A single-mask dry-release process for fabrication of high aspect ratio SOI MEMS devices
A single-mask dry-release process for fabrication of high aspect ratio SOI MEMS devices is presented, which takes advantage of the lag effect in silicon DRIE (deep reactive ion etching). The wide trenches and ...
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Article
Design and fabrication of a silicon probe for surface profilers
A micromachining probe for surface profilers is reported in this paper. This probe employs single crystal silicon double-ended tuning forks (DETFs) as the sensitive unit to achieve high resolution and frequenc...
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Article
An experimental investigation on decoupling performance for a lateral axis micromachined gyroscope with varying environmental parameters
This paper carries out an experiment study of decoupling performance for a novel lateral axis micromachined gyroscope with varying environmental parameters. The non-ideal mathematical model for the coupling me...
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Article
Simulation of a novel lateral axis micromachined gyroscope in the presence of fabrication imperfections
This paper proposes a method to simulate a lateral axis micromachined gyroscope in the presence of two kinds of fabrication imperfections using finite element simulation. Non-ideal performances caused by later...
