Abstract
With the development of integrated circuit technology, the functionality and complexity of CMOS circuitry increase greatly. It is important to integrate different materials and device technologies to create integrated micro and nano systems. Integrated microsystem technology has been developed to integrate the devices and components into microsystems that meet the high-performance requirements. Integration of microelectromechanical systems (MEMS) devices with silicon CMOS enables new high-performance integrated circuits, enhancing the capabilities of existing systems for a wide range of applications. Several integrated microsystem technologies, including Implantable microsystem, nano energy devices, bulk silicon micromachining process, and others, are discussed in this chapter. The progresses and main applications of the microsystem technology are briefly described.
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© 2024 Publishing House of Electronics Industry
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Wang, W., Zhang, H., Yang, Z. (2024). Integrated Microsystem Technology. In: Wang, Y., Chi, MH., Lou, J.JC., Chen, CZ. (eds) Handbook of Integrated Circuit Industry. Springer, Singapore. https://doi.org/10.1007/978-981-99-2836-1_88
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DOI: https://doi.org/10.1007/978-981-99-2836-1_88
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Publisher Name: Springer, Singapore
Print ISBN: 978-981-99-2835-4
Online ISBN: 978-981-99-2836-1
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