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  1. No Access

    Chapter

    Ultrafast Laser Volume Nanostructuring of Transparent Materials: From Nanophotonics to Nanomechanics

    The capability of ultrashort laser pulses to generate nonlinear absorption in the transparency window of dielectric materials is at the base of volume structuring. The result is a local change of the refractiv...

    Razvan Stoian, Ciro D’Amico, Yves Bellouard… in Ultrafast Laser Nanostructuring (2023)

  2. No Access

    Chapter

    Microsystems and Sensors

    In this chapter, the use of femtosecond laser to fabricate glass-based microsystems and sensors is examined. Several advanced technology demonstrators are presented, including some very unusual fused silica ME...

    Yves Bellouard, Ali A. Said, Mark Dugan, Philippe Bado in Femtosecond Laser Micromachining (2012)

  3. No Access

    Article

    Closed-loop control of a laser assisted carbon nanotube growth process for interconnects in flexible electronics

    A feedback control mechanism based on infrared radiation monitoring coupled with reflectivity information was developed to control the temperature of a laser assisted chemical vapor deposition process for the ...

    Yoeri van de Burgt, Yves Bellouard, Rajesh Mandamparambil… in MRS Online Proceedings Library (2011)

  4. No Access

    Article

    Monolithic Three-Dimensional Integration of Micro-Fluidic Channels and Optical Waveguides in Fused Silica

    This paper presents dramatic improvements in the micro-fabrication of three-dimensional microfluidic channels and high-aspect ratio tunnels within the bulk of a fused silica substrate. We also report the fabri...

    Yves Bellouard, Ali Said, Mark Dugan, Philippe Bado in MRS Online Proceedings Library (2011)

  5. No Access

    Article

    Thermal modeling of laser-annealing-induced crystallization of amorphous NiTi thin films

    Laser annealing of shape memory alloy thin films provides new opportunities in actuator design and fabrication for microelectromechanical systems applications. In this paper, we present a three-dimensional the...

    ** Wang, Yves Bellouard, Zhenyu Xue, Joost J. Vlassak in Applied Physics A (2008)

  6. No Access

    Article

    Investigation of Femtosecond Laser Irradiation on Fused Silica Etching Selectivity

    Femtosecond laser irradiation has various noticeable effects on fused silica. It can locally increase the index of refraction or modify the material chemical selectivity. Regions that have been exposed to the ...

    Yves Bellouard, Ali A. Said, Mark Dugan, Philippe Bado in MRS Online Proceedings Library (2004)

  7. No Access

    Article

    Microstructure Evolution of On-substrate NiTi Shape Memory Alloy Thin Films

    When deposited at room temperature, sputtered NiTi thin films are amorphous and need to be crystallized before they can be used as a functional material. We present the results of an annealing study on substra...

    ** Wang, Ann Lai, Joost J. Vlassak, Yves Bellouard in MRS Online Proceedings Library (2003)