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Article
Charakterisierung additiv gefertigter keramischer Bauteile via FFF-Verfahren
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Article
Morphology and oxygen vacancy investigation of strontium titanate-based photo electrochemical cells
In this paper single band gap photo electrochemical cells (PECs) are presented, which consist of strontium titanate (SrTiO3) photo anodes on nickel cathodes in potassium hydroxide electrolyte. SrTiO3 powders are ...
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Article
“LIGA2.X” process for mass production of single polymeric LIGA micro parts
The new modification of the LIGA process “LIGA2.X” is a promising process chain to replicate high accuracy single polymeric LIGA micro parts in large scale to feasible costs. The advantages of this new approa...
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Article
Ferroelectric thin film fabrication by direct UV-lithography
Due to their use in the fields of sensors, energy harvesting, capacitors and FeRAMs the fabrication of microstructured ferroelectric thin films is an important research field. Therefore a modified sol–gel proc...
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Article
Metal-ceramic-composite casting of complex micro components
Metal-ceramic-composite casting has a huge potential as a new manufacturing method for the production of complex-shaped micro sized parts or microsystems consisting of different metals and ceramics. The fundam...
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Article
Laser micromachining of metallic mold inserts for replication techniques
The laser microcaving (LMC) of steel is performed with cw Nd:YAG laser radiation. LMC enables a “clean” patterning process with only a small amount of debris and melt. During LMC the formation of a Ni-enriched...
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Article
Replication technologies for HARM devices: status and perspectives
Replication processes offer a number of considerable advantages for the production of micro components. This is not limited to the high economic efficiency achieved by numerous multiplications of master struct...
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Chapter
Rapid Prototy** and Rapid Tooling Techniques for the Manufacturing of Silicon, Polymer, Metal and Ceramic Microdevices
Rapid prototy** techniques allow the rapid and flexible generation of single design models as well as fabrication tools for the replication of small scale series, at present mainly in the macroworld. A curre...
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Article
Fabrication of ceramic microcomponents using deep X-ray lithography
In the last years the fabrication of micro components made from ceramic materials became more and more evident with respect to the pronounced chemical stability and the outstanding thermomechanical properties ...
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Article
Rapid fabrication of microcomponents – UV-laser assisted prototy**, laser micro-machining of mold inserts and replication via photomolding
The rapid fabrication of microcomponents made from polymers or composites will be presented. The whole fabrication process is divided into three main steps: first, direct patterning of polymers with excimer l...
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Article
Laser micromaching and light induced reaction injection molding as suitable process sequence for the rapid fabrication of microcomponents
For the last years different “rapid”-technologies like Rapid Prototy**, Rapid Manufacturing or Rapid Tooling have been developed in the macro world for a fast prototype or molding tool generation in case of...
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Article
Polymer materials for microsystem technologies
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Article
Various replication techniques for manufacturing three-dimensional metal microstructures
In microsystem technology a large range of different 6materials will be available only after the necessary micromanufacturing techniques have been developed or adapted. Existing manufacturing techniques are s...
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Article
Injection molding and related techniques for fabrication of microstructures
Injection molding technology and its different modifications represent established processes for manufacturing polymer products with high accuracy in large scale production. Enhanced machine and tool technolo...
