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Replication technologies for HARM devices: status and perspectives

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Abstract

Replication processes offer a number of considerable advantages for the production of micro components. This is not limited to the high economic efficiency achieved by numerous multiplications of master structures. Furthermore, micro devices can be produced of nearly every kind of material by one or a sequence of replication steps. In this contribution, five important processes of micro replication will be described, reflecting the wide variety from rapid prototy** over small and medium series to mass production. For future development, three main trends can be observed: the steady further miniaturization of sha** capability, the efforts to increase economic efficiency mainly by reducing cycle times and enlarging work areas, and the different approaches to combine sha** and joining procedures thus obtaining a minimum of process steps.

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Acknowledgments

The authors would like to thank their colleagues for their friendly and always helpful cooperation. Additionally, the authors thank for the financial support by the European Commission within the 4 M-Network of Excellence, the BMBF and the Deutsche Forschungsgemeinschaft DFG (SFB 499).

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Authors and Affiliations

  1. Karlsruhe Research Centre, Institute for Materials Research III, P.O. Box 3640, 76021, Karlsruhe, Germany

    V. Piotter, W. Bauer & T. Hanemann

  2. Institute for Micro Structure Technology, P.O. Box 3640, 76021, Karlsruhe, Germany

    M. Heckele

  3. Freiburg University, IMTEK, Georges-Köhler-Allee, 79085, Freiburg, Germany

    T. Hanemann & C. Müller

Authors
  1. V. Piotter
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  2. W. Bauer
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  3. T. Hanemann
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  4. M. Heckele
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  5. C. Müller
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Correspondence to V. Piotter.

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Piotter, V., Bauer, W., Hanemann, T. et al. Replication technologies for HARM devices: status and perspectives. Microsyst Technol 14, 1599–1605 (2008). https://doi.org/10.1007/s00542-008-0572-9

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  • DOI: https://doi.org/10.1007/s00542-008-0572-9

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