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  1. No Access

    Article

    Polyimide-fixed GaAs Island structure prepared using plasma etching technique

    GaAs micromachining technologies were used for fabricating polyimide-fixed thermally insulated GaAs Island structure. This structure, fully compatible with GaAs Heterostructure Field Effect Transistor (HFET) t...

    Š. Haščík, T. Lalinský, M. Krnáč, Ž. Mozolová, L. Matay… in Czechoslovak Journal of Physics (2004)

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    Article

    Advanced patterning techniques for nanodevice fabrication

    The key elements in the fabrication of future devices are lithography and pattern transfer. The continuous advances in miniaturization and increasing integration densities are a direct result of improved litho...

    I. Kostic, R. Andok, V. Barak, I. Caplovic… in Journal of Materials Science: Materials in… (2003)

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    Chapter

    GaAs Cantilever and Bridge Membrane-Like Structures Fully Compatible with AlGaAs/InGaAs/GaAs and InGaP/InGaAs/GaAs Based HFETs

    Silicon (Si) based MicroElectroMechanical Systems (MEMS) are now a well understood and widely used in various integrated micromachined microsensors and microactuators. In relation to this, Gallium Arsenide (Ga...

    T. Lalinsky, M. Drzik, L. Matay, I. Kostic… in Materials & Process Integration for MEMS (2002)