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  1. No Access

    Article

    Contact mechanics of a flexible imprinter for photocured nanoimprint lithography

    A flexible imprinter can be used to accommodate substrate or template roughness in nanoimprint lithography. The contact mechanics of a multi-layer imprinter incorporating bending and local deformation is descr...

    G.M. McClelland, C.T. Rettner, M.W. Hart, K.R. Carter, M.I. Sanchez… in Tribology Letters (2005)

  2. No Access

    Article

    Porous Organosilicates for On-Chip Dielectric Applications

    Porous organosilicates useful for on-chip insulator applications can be prepared by templating the vitrification of low molecular weight silsesquioxanes (SSQs) using highly branched, thermally labile macromole...

    R. D. Miller, R. Beyers, K. R. Carter, R. F. Cook… in MRS Online Proceedings Library (1999)

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    Chapter

    Nanoporous Polyimides

    Foamed polyimides have been developed in order to obtain thin film dielectric layers with very low dielectric constants for use in microelectronic devices. In these systems the pore sizes are in the nanometer ...

    J. L. Hedrick, K. R. Carter, J. W. Labadie… in Progress in Polyimide Chemistry II (1999)

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    Article

    Recent Advances in Low K Polymeric Materials

    As microelectronic device dimensions decrease and functionality density increases, a change in interconnect materials, both conductors and insulators must change from currently used materials. To this end, we ...

    K. R. Carter in MRS Online Proceedings Library (1997)

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    Article

    Nanoporous Polyimide Films from Polyimide-Aliphatic Polyester or Polyimide-Aliphatic Polycarbonate Copolymers

    We have explored polyimide foams created using a block copolymer approach as part of our research efforts to obtain thin film dielectric layers with very low dielectric constants for use in microelectronic dev...

    K.R. Carter, J.L. Hedrick, R. Richter, P.T. Furuta… in MRS Online Proceedings Library (1996)

  6. No Access

    Article

    Characterization of thin Polymeric Nanofoam films by Transmission Electron Microscopy and Small Angle Neutron Scattering

    Thin film polymer nanofoams are produced from triblock copolymers of a fluorinated polyimide, 3F/PMDA (derived from pyromelletic dianhydride (PMDA) and 1,1-bis(4-aminophenyl)-1-phenyl-2,2,2-trifluoroethane (3F...

    R. M. Briber, J. S. Fodor, T. P. Russell, R. D. Miller… in MRS Online Proceedings Library (1996)

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    Article

    Polyimide Nanofoams For Low Dielectric Applications

    Foamed polyimides have been developed in order to obtain thin film dielectric layers with very low dielectric constants for use in microelectronic devices. In these systems the pore sizes are in the nanometer ...

    K. R. Carter, H. J. Cha, R. A. Dipietro, C. J. Hawker… in MRS Online Proceedings Library (1995)

  8. No Access

    Article

    Cyclic ureas as solvents for poly(aryl ether) synthesis

    The synthesis of various poly(aryl ethers) and related small molecule compounds were examined using the cyclic urea 1,3-Dimethyl-3,4,5,6-tetrahydro-2(IH)-pyrimidinone (N,N′-dimethylpropylene urea, DMPU) as the...

    J. W. Labadie, K. R. Carter, J. L. Hedrick, H. Jonsson, S. Y. Kim… in Polymer Bulletin (1993)