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    Article

    Defect characterization of n-type Si1−xGex after 1.0 kev helium-ion etching

    SiGe heterostructures with their associated geometries and properties promise a novel generation of Si-based devices. Surface processing and, in particular, dry or plasma etching of semiconductors is a key tec...

    S. A. Goodman, F. D. Auret, K. Nauka, J. B. Malherbe in Journal of Electronic Materials (1997)

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    Article

    Electronic Properties of Defects Formed in n-Si During Sputter-Etching in an Ar Plasma

    We have employed current-voltage (IV), capacitance-voltage (CV) and deep level transient spectroscopy (DLTS) techniques to characterise the defects induced in n-Si during RF sputter-etching in an Ar plasma. Th...

    P. N. K. Deenapanray, F. D. Auret, C. Schutte, G. Myburg in MRS Online Proceedings Library (1996)

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    Article

    AES and SIMS investigations of the oxide films on Fe-40Cr-Ru alloys

    Auger and SIMS depth profiling have been used to investigate the effect of ruthenium addition on the oxidation behaviour of the Fe-40Cr-Ru alloys oxidized in air at 500 °C. Auger results revealed that the oxid...

    S. C. Tjong, W. O. Barnard, J. B. Malherbe in Journal of Materials Science (1992)

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    Article

    Ion Beam Mixing of Sb Schottky Contacts on n-Si

    TheI—V characteristics of as—deposited antimony Schottky contacts on silicon were extremely sensitive to interface conditions. This led to unpredictable results for the unimplanted contacts. After Si* implantatio...

    J. B. Malherbe, K. P. Weimer, L. J. Bredell, E. Friedland in MRS Online Proceedings Library (1989)