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Article
Defect characterization of n-type Si1−xGex after 1.0 kev helium-ion etching
SiGe heterostructures with their associated geometries and properties promise a novel generation of Si-based devices. Surface processing and, in particular, dry or plasma etching of semiconductors is a key tec...
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Article
Electronic Properties of Defects Formed in n-Si During Sputter-Etching in an Ar Plasma
We have employed current-voltage (IV), capacitance-voltage (CV) and deep level transient spectroscopy (DLTS) techniques to characterise the defects induced in n-Si during RF sputter-etching in an Ar plasma. Th...
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Article
AES and SIMS investigations of the oxide films on Fe-40Cr-Ru alloys
Auger and SIMS depth profiling have been used to investigate the effect of ruthenium addition on the oxidation behaviour of the Fe-40Cr-Ru alloys oxidized in air at 500 °C. Auger results revealed that the oxid...
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Article
Ion Beam Mixing of Sb Schottky Contacts on n-Si
TheI—V characteristics of as—deposited antimony Schottky contacts on silicon were extremely sensitive to interface conditions. This led to unpredictable results for the unimplanted contacts. After Si* implantatio...