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  1. No Access

    Article

    Golden ratio-based and tapered Diptera inspired wings: Their design and fabrication using standard MEMS technology

    This work presents our understanding of insect wings, and the design and micromachining of artificial wings with golden ratio-based and tapered veins. The geometric anisotropy of Leading Edge Veins (LEVs) sele...

    X. Q. Bao, E. Cattan in Journal of Bionic Engineering (2011)

  2. No Access

    Article

    Design, analysis and fabrication of high frequency piezoelectric transducers

    Applicability of the finite element method to optimize high frequency transducers is reported. Two recent studies on piezoelectric transducers or systems are presented, in which the FEM algorithm is used for t...

    A. C. Hladky-Hennion, J. C. Debus, B. Dubus, F. Duval… in Journal of Electroceramics (2007)

  3. No Access

    Article

    PZT Thin Film Bi-Layer Devices for Phase Controlled Actuation in MEMS

    A potential application for ferroelectric thin films is micro positioning and actuation. For using PZT films as micro-actuators it is desirable to have film thicknesses of comparable size to the underlying str...

    D.F.L. Jenkins, W.W. Clegg, E. Cattan, D. Remiens in Journal of Electroceramics (2001)

  4. No Access

    Article

    Influence of PbTiO3 Buffer Layers on Microstructural Properties of Pb(Zr,Ti)O3 Films Deposited by Sputtering

    Pb(Zr,Ti)O3 (PZT) films with very thin PbTiO3 (PT) buffer layers inserted between the film and the Si/SiO2/Ti/Pt substrate were grown by a rf magnetron sputtering technique. The Xray diffraction patterns and the ...

    E. Cattan, R. Roma, G. Velu, B. Jaber, D. Remiens… in MRS Online Proceedings Library (1996)

  5. No Access

    Article

    Physicochemical and Microstructural Characterization of Rf Sputtering Magnetron Pb(ZrTi)O3 Thin Films

    Lead zirconate titanate thin films were deposited on Pt/TiN/BPSG/Si structures by sputtering an oxide target of nominal composition (Pb(Zr0.55, Ti0.45)O3 or PZT) in argon plasma. The PZT films were deposited at d...

    F. Varniere, E. Cattan, B. Eakim, H. Achard, B. Agius in MRS Online Proceedings Library (1993)

  6. No Access

    Article

    Physicochemical Properties of Rf Magnetron Sputtered Lead Zirconate Titanate Thin Films

    Lead zirconate titanate thin films have been grown by rf magnetron sputtering an oxide target of nominal composition [Pb(Zr0.55,Ti0.45)O3 or PZT] in argon. The kinetics of the sputtering process and the effect of...

    E. Cattan, B. Agius, H. Achard, J. P. Joly… in MRS Online Proceedings Library (1991)