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    Chapter and Conference Paper

    Extension of Surface/Bulk Micromachining: One-Mask Fabrication Technology Enabling the Integration of 6-DoF Inertial Sensors on a Single Wafer

    In this paper, a new technology that enables the fabrication of single-crystal silicon microstructures capable of detecting the vertical motion without a bottom electrode is presented. The vertical-motion sens...

    Sangwoo Lee, Byeung-Leul Lee, Kyu Dong Jung… in Transducers ’01 Eurosensors XV (2001)