Skip to main content

1 Result(s)

within Article Remove this filter Wolfram Dötzel Remove this filter

and

  1. No Access

    Article

    A Frequency Selective Silicon Vibration Sensor with Direct Electrostatic Stiffness Modulation

    In the field of industrial machinery an increasing demand for low cost vibration measurement equipment exists. The described frequency selective structures represent a low-cost alternative to the commonly used...

    Dirk Scheibner, Jürgen Wibbeler, Jan Mehner… in Analog Integrated Circuits and Signal Proc… (2003)