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  1. No Access

    Article

    Hot embossing of electrophoresis microchannels in PMMA substrates using electric heating wires

    A simple method based on electric heating wires has been developed for the rapid fabrication of poly(methyl methacrylate) (PMMA) electrophoresis microchips in ordinary laboratories without the need for microfa...

    Zhibing Gan, Zhengyin Yu, Zhi Chen, Gang Chen in Analytical and Bioanalytical Chemistry (2010)

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    Article

    A novel approach for MEMS with galvanic protection on SOI wafer

    A novel SOI-MEMS process with galvanic protection technique is presented in this paper. After front-end-of-line processes and metallization with Au on SOI wafers, the moving structures and release trenches are...

    Wenshan Wei, Weilong You, Wei Zhao, Zhengyin Yu, Jun Pang… in Microsystem Technologies (2015)