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Article
A novel approach for MEMS with galvanic protection on SOI wafer
A novel SOI-MEMS process with galvanic protection technique is presented in this paper. After front-end-of-line processes and metallization with Au on SOI wafers, the moving structures and release trenches are...
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Article
Hot embossing of electrophoresis microchannels in PMMA substrates using electric heating wires
A simple method based on electric heating wires has been developed for the rapid fabrication of poly(methyl methacrylate) (PMMA) electrophoresis microchips in ordinary laboratories without the need for microfa...