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  1. No Access

    Article

    Pioneering Application of Corona Charge-Kelvin Probe Metrology to Noncontact Characterization of In0.53 Ga0.47 As/Al2O3/HfO2 Stack

    We report the first successful application of corona charging noncontact C-V and I-V metrology to interface and dielectric characterization of high-k/III-V structures. The metrology, which has been commonly us...

    Alexandre Savtchouk, John D’Amico, Marshall Wilson… in MRS Online Proceedings Library (2014)

  2. No Access

    Article

    Characterization of ALD Beryllium Oxide as a Potential High-k Gate Dielectric for Low-Leakage AlGaN/GaN MOSHEMTs

    The chemical and electrical characteristics of atomic layer deposited (ALD) beryllium oxide (BeO) on GaN were studied via x-ray photoelectron spectroscopy, current–voltage, and capacitance–voltage measurements...

    Derek W. Johnson, Jung Hwan Yum, Todd W. Hudnall… in Journal of Electronic Materials (2014)

  3. No Access

    Chapter

    Materials and Technologies for III-V MOSFETs

    The paper contains an overview of progress and challenges of group III-V MOSFETs. It begins with comparison of well-established high-electron mobility transistors for logic applications to MOSFET technology. F...

    Serge Oktyabrsky, Yoshio Nishi… in Fundamentals of III-V Semiconductor MOSFETs (2010)

  4. No Access

    Article

    Catalytic Forming Gas Anneal on III-V/Ge MOS systems

    Catalytic-FGA, a combination of the standard forming gas anneal with a catalytic metal gate, has been applied to study the hydrogen passivation of III-V/Ge MOS systems. Pd (or Pt) metal gate catalytically diss...

    Wei-E Wang, H.-C. Lin, G. Brammertz, A. Delabie… in MRS Online Proceedings Library (2009)

  5. No Access

    Article

    High Mobility Channel Materials and Novel Devices for Scaling of Nanoeelectronics beyond the Si Roadmap

    The use of high mobility channel materials such as Ge and III/V compounds and some novel device concepts are being explored for future CMOS applications. Various passivation schemes are investigated for the Ge...

    Marc Heyns, Florence Bellenger, Guy Brammertz… in MRS Online Proceedings Library (2009)