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    Defects induced by P+-implanted in silicon

    Cross-section transmission electron microscopy (X-TEM) has been used to show the microstructures and the defects in P+-implanted (100) silicon crystals. P+ implantation was done at room temperature with the energ...

    Yan Yong, Li Qi, Feng Duan, Wang Pei Da, Sun Hui Ling in Journal of Materials Science (1989)