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  1. Article

    Open Access

    A snapshot review on flash lamp annealing of semiconductor materials

    Flash lamp annealing (FLA) is a non-equilibrium annealing method on the sub-second time scale which excellently meets the requirements of thin-film processing. FLA has already been used in microelectronics, mo...

    Lars Rebohle, S. Prucnal, Y. Berencén, V. Begeza, S. Zhou in MRS Advances (2022)

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