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    Chapter

    A Salicide Base Contact Technology (SCOT) for Use in High Speed Bipolar VLSI

    This chapter describes a new process technology called Salicide (self- aligned silicide) base COntact Technology (SCOT), that is applied for realizing high performance prescaler IC and high-gate-density master...

    Tadashi Hirao, Tatsuhiko Ikeda, Yoichi Kuramitsu in Ultra-Fast Silicon Bipolar Technology (1988)