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    Growth and Properties of Double-Sided YBCO Films Deposited by Off-Axis Sputtering for Microwave Applications

    The double-sided YBa2Cu3O y (YBCO) films were grown on LaAlO3 (LAO) substrates by an off-axis magnetron sputtering system with two 2-inch sputtering guns. High-quality YBCO film...

    L. M. Wang, Chen-Chung Liu, Mao-Yuan Horng… in Journal of Low Temperature Physics (2003)