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Growth and Properties of Double-Sided YBCO Films Deposited by Off-Axis Sputtering for Microwave Applications

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Abstract

The double-sided YBa2Cu3O y (YBCO) films were grown on LaAlO3 (LAO) substrates by an off-axis magnetron sputtering system with two 2-inch sputtering guns. High-quality YBCO films within a 50-mm-diameter area were obtained. The homogeneous YBCO films revealed transition temperature T c(R=0) of ≥86K and a critical current density J c (zero field) of ∼1.5×106 A/cm2 at 77 K. Thesurface impedance of YBCO films was measured using a probe-coupling type microstripline resonator method. The surface resistance R S of ∼1.8 μΩ was obtained at 77 K around 2180 MHz. Additionally, a HTS three pole bandpass filter was fabricated and revealed a good microwave characteristic. The influence of surface roughness on microwave properties of YBCO films was discussed.

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Authors and Affiliations

  1. Department of Electrical Engineering, Da-Yeh University, Chang-Hwa, 515, Taiwan

    L. M. Wang, Chen-Chung Liu, Mao-Yuan Horng, Jyh-Haur Tsao & H. H. Sung

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  1. L. M. Wang
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  2. Chen-Chung Liu
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  3. Mao-Yuan Horng
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  4. Jyh-Haur Tsao
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  5. H. H. Sung
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Wang, L.M., Liu, CC., Horng, MY. et al. Growth and Properties of Double-Sided YBCO Films Deposited by Off-Axis Sputtering for Microwave Applications. Journal of Low Temperature Physics 131, 551–556 (2003). https://doi.org/10.1023/A:1022915722790

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