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    Article

    Transmission Electron Diffraction Techniques for NM Scale Strain Measurement in Semiconductors

    An overview is given of transmission electron microscopy techniques to address strain with nm scale spatial resolution. In particular the possibilities and limitations of (large angle) convergent beam electron...

    J. Vanhellemont, K.G.F. Janssens, S. Frabboni, P. Smeys… in MRS Online Proceedings Library (1995)

  2. No Access

    Article

    Transmission Electron Diffraction Techniques for NM Scale Strain Measurement in Semiconductors

    An overview is given of transmission electron microscopy techniques to address strain with nm scale spatial resolution. In particular the possibilities and limitations of (large angle) convergent beam electron...

    J. Vanhellemont, K.G.F. Janssens, S. Frabboni, P. Smeys… in MRS Online Proceedings Library (1995)