-
Article
Application of FTIR spectra for evaluating interfacial reactions in metal matrix composites
Manufacturing of Saffil/MgLi metal matrix composites by the melt infiltration process is accompanied by extensive interfacial redox reaction between δ-Al2O3 fibers (Saffil) and lithium. The present paper deals wi...
-
Article
Influence of Ta-based Diffusion Barriers on the Microstructure of Copper Thin Films
Copper represents the most commonly used interconnect material in ultra large-scale integration (ULSI) technology. Given that the successful implementation of Cu requires the use of underlying diffusion barrie...
-
Article
Thermodynamic reassessment of the Cu-O phase diagram
Parts of the copper-oxygen equilibrium phase diagram were reassessed using the calculation of phase diagram technique (CALPHAD). The model parameters were optimized to yield the best fit between calculated and...
-
Article
Radio frequency glow discharge source with integrated voltage and current probes used for sputtering rate and emission yield measurements at insulating samples
Radio frequency glow discharge optical emission spectroscopy (RF-GD-OES) is routinely used for the chemical analysis of solid samples. Two independent electrical signals from the discharge are required for qua...
-
Article
A novel copper damascene technique for power loaded SAW structures
The damage of finger electrodes of surface acoustic wave (SAW) structures due to material transport (acoustomigration) forming voids and hillocks is strongly associated with the SAW stress field, the temperatu...
-
Article
Microstructure and composition of annealed Al/Ti-metallization layers
Al/Ti multilayers with columnar grains were deposited by electron-beam evaporation on piezoelectric LiNbO3 substrates. After annealing in air and under vacuum conditions dissolution of the Ti interlayer was obser...
-
Article
Comparison of the annealing behavior of thin Ta films deposited onto Si and SiO2 substrates
Structural changes at annealing temperatures (T an) of 500–1,100°C were investigated for thin Ta films which were sputter-deposited onto pure Si substrates and onto thermally oxidized Si. In the as-deposited stat...
-
Article
Specific properties of fine SnO2 powders connected with surface segregation
The effect of surface segregation in Sb- and In-doped SnO2 fine-grained powders has been analyzed in comparison with single-crystalline samples. The kinetics and thermodynamics of the Sb and In segregation proces...
-
Article
AES and SIMS investigation of diffusion barriers for copper metallization in power-SAW devices
Barrier layers for Cu-metallization in surface acoustic wave (SAW) devices were investigated by AES and SIMS depth profiles. Two layered systems on LiNbO3 substrate have been analyzed after annealing in air up t...
-
Article
XPS investigations of thin tantalum films on a silicon surface
Ultra thin tantalum-based diffusion barriers are of great interest in copper metallisation technology. Even the smallest amounts of copper that diffuse into the active silicon regions on a microprocessor will ...
-
Article
Nanostructure and thermoelectric properties of ReSi2±x thin films
Anomalies in the nanostructure evolution of ReSi2±x thin films have proved to be of large interest in connection with their thermoelectric properties. By means of electron microscopic methods the correlation bet...
-
Article
Characterization of laser-irradiated YNi2B2C surfaces by Auger electron spectroscopy
The suitability of laser ablation inductively coupled plasma mass spectrometry (LA–ICP–MS) for precise analysis of YNi2B2C has been investigated. The intensity ratios B/Y and Ni/Y were found to vary during ablat...
-
Article
Calibration of XPS – energy scale for determination of the oxidation states of do** elements in SnO2 powders
X-ray photoelectron spectroscopy (XPS) has been used to investigate the oxidation states of do** elements in doped SnO2 powders. Because of low conductivity, however, charging and resulting peak shift is obser...
-
Article
Structural features of the La-Sr-Fe-Co-O system
A structural study has been performed on the La0.8Sr0.2FexCo1-xO3 (x = 0.025 to 0.3) system displaying large magnetoresistance (MR) at room temperature. A detailed analysis of the crystal structure and microstruc...
-
Article
In-Situ Electromigration Damage of Al Interconnect Lines and the Influence of Grain Orientation
In this work the authors want to report some experiments concerning unpassivated Al interconnect lines of 8 and 1.4 microns width which have been damaged by in-situ electromigration in the SEM (temperature 230...
-
Article
Morphology and structure of nanoscale Co-Cu multilayers
Nanoscale cobalt-copper multilayers prepared by pulsed laser deposition on oxidized silicon substrate were investigated by means of transmission electron microscopic (TEM) methods combined with energy dispers...
-
Article
Bombardment-induced silicide formation at rhenium-silicon interfaces studied by XPS and TEM
For further evaluation of photoemission properties of argon ion bombarded rhenium-silicon thin films pure element Re(21 nm) / Si(39 nm) / Re(21 nm) layer sandwiches were investigated on Si(111) substrates. TE...
-
Article
Phase relations in the Fe-rich region of the Fe-Gd-Mo ternary system at 800 °C
The phase relation in the Fe-rich region of the Fe-Gd-Mo ternary system at 800 °C has been investigated using x-ray powder diffraction followed by Rietveld refinement and electron probe microanalysis. A partia...
-
Article
Fractal microstructures in hydrating cement paste
-
Article
Experimental study of ternary Fe-Gd-Mo phase diagram
The ternary system Fe-Gd-Mo was investigated at 1200 °C. A complete isothermal section is given, containing two ternary solid phases of composition Gd1+n Fe12−x−y Mo ...
