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    High Resolution Auger Depth Profiles using a Dual Ion Gun System

    A dual ion gun system has been proposed (D.E. Sykes et al, Appl. Surf. Sci. 5 (1980) 103) to reduce texturing and improve depth resolution during Auger sputter depth profiling. We have evaluated this ion gun c...

    S. Ingrey, J. P. D. Cook in MRS Online Proceedings Library (1985)