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Article
Atomic force microscopy investigations on nanoindentation impressions of some metals: effect of piling-up on hardness measurements
In the indentation test, the hardness and the elastic modulus depend strongly on the estimate of the indenter-material contact area at peak load. However, many elastic–plastic behaviours such as elastic recove...
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Article
High Reactivity of CH2 Radical in an AR–CH4 Post-Discharge
This work is devoted to the study of the reactivity of CH 2 radical in the post-discharge of an Ar–CH 4 microwave plasma. These radicals are selectively produced using the energy transfer reaction between argon ...
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Article
Characterization of an argon-hydrogen microwave discharge used as an atomic hydrogen source. Effect of hydrogen dilution on the atomic hydrogen production
This work is devoted to the study of an argon-hydrogen microwave plasma used as an atomic hydrogen source. Our attention has focused on the effect of the hydrogen dilution in argon on atomic hydrogen productio...
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Article
Spectroscopic study of a D.C. discharge in an argon-silane-nitrogen gas mixture under silicon nitride thin film deposition conditions
A detailed experimental investigation of a D.C. discharge in an argon-silanenitrogen gas mixture is undertaken using mainly spatially resolved spectroscopy. Discharge parameters are studied as functions of the...
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Article
Deposition of silicon nitride thin films by reaction of SiH4 in a nitrogen post-discharge
Silicon nitride thin films are deposited on silicon wafers at room temperature when silane gas is injected in a nitrogen flowing post-discharge. Reactive processes involving siane molecules and long-lifetime n...